How to calculate dopant density from resistivity
问题描述：
How to calculate dopant density from resistivity
I can get the sheet resistivity by using a 4-probe station,in order to get the dopant density of a S-doped InP,what else do I need to know?
答
conductivity σ=1/ρ=e(μn*Nd+μp*Na)
and if it is a Si doped with P it is n-type
so σ=eμn*Nd
So you need to know the mobility relationship with Nd